Tracking and Synchronization with Inversion-Based ILC for a Multi-Actuator-Driven Wafer Inspection Cartridge Transport Robot System

被引：3

作者：

Oh, Dong Jun ^{[1
]}

Baek, Seung Guk ^{[2
]}

Nam, Kyung-Tae ^{[3
]}

Koo, Ja Choon ^{[1
]}

机构：

[1] Sungkyunkwan Univ, Sch Mech Engn, Suwon 16419, South Korea

[2] Korea Inst Machinery & Mat, Dept Ultra Precis Machines & Syst, Daejeon 34103, South Korea

[3] KITECH, Digital Transformat R&D Dept, Ansan 15588, South Korea

来源：

ELECTRONICS | 2021年 / 10卷 / 23期

基金：

新加坡国家研究基金会;

关键词：

dual-actuator-driven system; iterative learning control; tracking control; synchronization control; inversion-based ILC; ITERATIVE LEARNING CONTROL; MOTORS; GANTRY;

D O I：

10.3390/electronics10232904

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper proposes a simple tracking and synchronization control of a dual-drive system using inversion-based iterative learning control (IILC), which reformulates the model at each iteration based on input/output data. By the power of the IILC, this work simplifies the dual-actuator-driven dynamic system control problem that is normally addressed with a MIMO method. This work also shows the potential of the IILC for nonlinear system applications by reformulating the model at each iteration based on the input/output data. An analytical representation of the iteration-varying IILC followed by simulations is provided. A set of physical system testings with a dual-motor gantry and a semiconductor wafer inspection robotic system are carried out to verify the control method.

引用

页数：13