A simple technique to design microfluidic devices for system integration

被引:2
|
作者
Yang, Mimi X. [1 ]
Wang, Benjamin [2 ]
Hu, Xiaolin [1 ]
Wong, H. -S. Philip [1 ]
机构
[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[2] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA
基金
美国国家科学基金会;
关键词
ON-A-CHIP; PDMS; FABRICATION;
D O I
10.1039/c7ay02177a
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We present a robustmethod to fabricate a polydimethylsiloxane (PDMS) microfluidic devicewith critical channel features located near the periphery. The fabricated device has a window cutout, allowing close placement and integration of the channel with solid state circuits and devices. The flow characteristics of the fabricated device are shown to closely follow that of theoretical behavior, making it an appropriate alternative to a monolithic, cast-molded device. As an illustration of the use of this method, a novel integrated microfluidic-electronic system is demonstrated with the microfluidic channel bonded directly onto the surface of an integrated circuit while leaving access to probe pads on the chip's surface. This fabrication process has important implications in furthering the development of next generation microfluidic-based lab on chip systems.
引用
收藏
页码:6349 / 6356
页数:8
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