Design and Fabrication of Microwave Kinetic Inductance Detectors using NbN Symmetric Spiral Resonator Array

We designed and fabricated a microwave kinetic inductance detector (MKID) using a niobium nitride (NbN) symmetric spiral resonator array. Previously we revealed that a rewound spiral structure works as not only a high-Q half-wavelength resonator but also as a broadband terahertz antenna. We conducted simulations for a 9 resonator array assuming NbN as the superconducting material and sapphire as the dielectric substrate, and obtained a maximum attenuation of over 30 dB and unloaded quality factors of over 2x10(5) for frequencies between 4.4 and 4.9 GHz. We fabricated the 9 resonator array MKID using NbN thin film deposited on an m-sapphire substrate by using dc magnetron sputtering. We observed half-wavelength resonances of around 4.5 GHz at 4 K. We measured the optical response of the MKID. The frequency shift was 0.5 MHz when illuminated with 650 nm photons.