CMOS-MEMS membrane for audio-frequency acoustic actuation

Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 Wt. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU [1]. The ability to build a membrane directly on a standard CMOS chip, integrating mechanical structures with signal processing electronics will enable a variety of applications including economical earphones, microphones, hearing aids, high-fidelity earphones, cellular phones and noise cancellation. The large compliance of the CMOS-MEMS membrane also promises application as a sensitive microphone and pressure sensor.