On-chip optical interconnects with compact and low-loss light distribution in silicon-on-insulator rib waveguides

被引:38
|
作者
Cassan, E [1 ]
Laval, S [1 ]
Lardenois, S [1 ]
Koster, A [1 ]
机构
[1] Ctr Univ Orsay, CNRS, UMR, Inst Elect Fondamentale, F-91405 Orsay, France
关键词
on-chip clock distribution; optical interconnects; rib waveguides; silicon-on-insulator (SOI);
D O I
10.1109/JSTQE.2003.814185
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The possibility of on-chip optical interconnects using rib waveguides on silicon-on-insulator substrates (SOI) is demonstrated. It is shown that ultrasmall (< 0.4 mum(2)) rib waveguides intrinsically combine the advantages of low. measured propagation losses (< 0.5 dB/cm), negligible crosstalk between waveguides and no crosstalk at right. angle crossings. A set of devices have been studied using finite difference time domain analysis to realize 90degrees change of direction and beam splitting, including fully etched mirrors and 1 x 2 star couplers of 14 x 8-mum area. Considering the compactness and efficiency of all studied devices, it is shown that a compact and low-loss light distribution can be achieved in an integrated circuit toward at least 64 photooletectors with SOI rib waveguides that fully meets requirements of minimal power to be delivered to receiver circuitry.
引用
收藏
页码:460 / 464
页数:5
相关论文
共 50 条
  • [1] Intra-chip optical interconnects with compact and low-loss light distribution in silicon-on-insulator rib waveguides
    Cassan, E
    Lardenois, S
    Pascal, D
    Vivien, L
    Heitzmann, M
    Bouzaida, N
    Mollard, L
    Orobtchouk, R
    Laval, S
    PROCEEDINGS OF THE IEEE 2003 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2003, : 39 - 41
  • [2] Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors
    Lardenois, S
    Pascal, D
    Vivien, L
    Cassan, E
    Laval, S
    Orobtchouk, R
    Heitzmann, M
    Bouzaida, N
    Mollard, L
    OPTICS LETTERS, 2003, 28 (13) : 1150 - 1152
  • [3] Improvement of Sidewall Roughness of Sub-Micron Silicon-on-Insulator Waveguides for Low-Loss On-Chip Links
    Bellegarde, Cyril
    Pargon, Erwine
    Sciancalepore, Corrado
    Petit-Etienne, Camille
    Hughes, Vincent
    Hartmann, Jean-Michel
    Lyan, Philippe
    SILICON PHOTONICS XII, 2017, 10108
  • [4] Low-loss silicon-on-insulator photonic crystal waveguides
    Arentoft, J
    Sondergaard, T
    Kristensen, M
    Boltasseva, A
    Thorhauge, M
    Frandsen, L
    ELECTRONICS LETTERS, 2002, 38 (06) : 274 - 275
  • [5] Low Loss Polycrystalline Silicon Waveguides and Devices for Multilayer On-Chip Optical Interconnects
    Kwong, David
    Hosseini, Amir
    Covey, John
    Zhang, Yang
    Xu, Xiaochuan
    Chen, Ray T.
    OPTOELECTRONIC INTERCONNECTS XIII, 2013, 8630
  • [6] Compact and low loss silicon-on-insulator rib waveguide 90° bend
    Qian, Yusheng
    Kim, Seunghyun
    Song, Jiguo
    Nordin, Gregory P.
    OPTICS EXPRESS, 2006, 14 (13): : 6020 - 6028
  • [7] Low-loss strip-loaded slot waveguides in Silicon-on-Insulator
    Ding, Ran
    Baehr-Jones, Tom
    Kim, Woo-Joong
    Xiong, Xugang
    Bojko, Richard
    Fedeli, Jean-Marc
    Fournier, Maryse
    Hochberg, Michael
    OPTICS EXPRESS, 2010, 18 (24): : 25061 - 25067
  • [8] Low-loss photonic wires and compact ring resonators in silicon-on-insulator
    Dumon, P
    Bogaerts, W
    Van Campenhout, J
    Wiaux, V
    Wouters, J
    Beckx, S
    Baets, R
    PHOTONIC CRYSTAL MATERIALS AND NANOSTRUCTURES, 2004, 5450 : 360 - 368
  • [9] Low-Loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate
    Kang, JoonHyun
    Atsumi, Yuki
    Oda, Manabu
    Amemiya, Tomohiro
    Nishiyama, Nobuhiko
    Arai, Shigehisa
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (12)
  • [10] Low-loss amorphous silicon multilayer waveguides vertically stacked on silicon-on-insulator substrate
    Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
    不详
    Jpn. J. Appl. Phys., 12