Simultaneous fabrication of thousands of holes using high power KrF excimer laser

被引：0
|
作者：
Sekizawa, N [1 ]
Niwatsukino, Y [1 ]
Sajiki, K [1 ]
Nire, T [1 ]
机构：
[1] KOMATSU Ltd, Div Res, Hiratsuka, Kanagawa 2548567, Japan
来源：
CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST | 2001年
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We have developed advanced via hole drilling system using high power KrF excimer laser and micro lens array, and fabricated 2000 holes (diameter:50mum) in 40mm square area of resin layer at once.
引用
收藏
页码：318 / 319
页数：2
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