Via-in-pixel design of truly 2D extendable photodiode detector for medical CT imaging

This paper presents an advanced design of the photodiode detector for medical imaging, especially for the X-ray computed tomography applications. In this paper, through wafer interconnection technology with Via-in-pixel design is utilized to achieve the truly 2D extendable feature of the photodiode detector. The active area of each photodiode element on the detector can achieve the maximum active area with the fixed pitch size. Comparing to the Via-off-pixel design, different parameters of the photodiode with Via-in-pixel design were measured and analyzed from the demonstrated samples. The results show that the performances of the samples either meet or exceed the requirements of the modern X-ray computed tomography applications.