Self-aligned Growth and Optimization of Carbon Nanotube

被引：0
|
作者：
Wu Ying [1 ]
Zhou Zhaoying [2 ]
Sun Lijun [2 ]
Zhang Jin
Zhang Xiaoyun [1 ]
机构：
[1] Chongqing Univ Sci & Technol, Chongqing 401331, Peoples R China
[2] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
来源：
MATERIALS SCIENCE AND ENGINEERING, PTS 1-2 | 2011年 / 179-180卷
基金：
中国国家自然科学基金;
关键词：
carbon nanotubes (CNT); gas-flow assisted growth; fluent simulator; chemical vapor deposition (CVD);
D O I：
10.4028/www.scientific.net/AMR.179-180.316
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
CNT-based integrated components show potential application in many fields. The growth of carbon nanotube is very important process for the fabrication of CNT-based component. Self-aligned growth of carbon nanotube method by gas-flowing techniques is reported in this paper, which results in CNT growth along gas-flow direction. The effect of gas-flow was analyzed with numerical simulation and the growth optimization was put forward. Scanning electronic microscopy (SEM) images demonstrate that the self-aligned carbon nanotube can be realized by a gas-flowing CVD process and the distribution of carbon nanotube can be controlled by the gas-flowing rates. This research provides a parallel method for the large-scale integration of carbon nanotube into electronic, optoelectronic, and sensing systems.
引用
收藏
页码：316 / +
页数：2
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