Volume Manufacturing of High Power Diode Lasers Using 6" Wafers

被引：4

作者：

Wang, Jun ^{[1
,2
]}

Tan, Shaoyang ^{[1
]}

Liu, Heng ^{[1
]}

Li, Bo ^{[1
]}

Hu, Yiwen ^{[1
]}

Zhao, Run ^{[1
]}

Xiao, Xiao ^{[1
]}

Cheng, Yang ^{[1
]}

Guo, Yintao ^{[1
]}

Zhao, Wu ^{[2
]}

Zhang, Lichen ^{[2
]}

Miao, Pei ^{[2
]}

Guo, Lu'an ^{[1
]}

Deng, Guoliang ^{[2
]}

Yang, Huomu ^{[2
]}

Zhou, Hao ^{[2
]}

Zhang, Hong ^{[2
]}

Liao, Xinsheng ^{[1
]}

机构：

[1] Suzhou Everbright Photon Co Ltd, Suzhou, Peoples R China

[2] Sichuan Univ, Chengdu, Peoples R China

来源：

HIGH-POWER DIODE LASER TECHNOLOGY XX | 2022年 / 11983卷

关键词：

High power; Diode laser; Volume manufacturing; 6 '' Wafer; GaAs fabrication;

D O I：

10.1117/12.2610727

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High power diode lasers are widely used as the pump sources for fiber lasers and solid-state lasers, or the light sources for direct diode laser systems. To meet the emerging needs of fiber lasers, solid state lasers and direct diode laser systems, diode lasers are moving towards higher volume manufacturing, along with higher performance and lower cost. In this paper, we will present our progresses in these areas. We have set up a 6 '' GaAs wafer production line for high power diode laser chips, which includes MOCVD epitaxy and wafer fabrication. With the 6 '' wafer production line, we are producing multi-million chips per month for fiber laser pumping. The 6 '' wafers show great uniformity and reproducibility. Device performance is outstanding, with near 70% efficiency and high CW roll-over power.

引用

页数：9

共 50 条

[1] Manufacturing with novel high-power diode lasers
Schulz, W
Poprawe, R
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2000, 6 (04) : 696 - 705
[2] HIGH POWER DIODE LASERS
不详
LASER FOCUS WORLD, 2014, 50 (12): : 24 - 24
[3] Soldering with high power diode lasers using shaped pulses
Ehlers, B
Heinemann, S
ICALEO (R)'99: PROCEEDING OF THE LASER MATERIALS PROCESSING CONFERENCE, VOL 87, PTS 1 AND 2, 2000, 87 : A245 - A252
[4] Laser welding of polymers using high power diode lasers
Bachmann, FG
Russek, UA
LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES, 2003, 5121 : 385 - 398
[5] Advances in laser soldering using high power diode lasers
Hoult, A.P. (Tony.Hoult@CoherentInc.com), 1600, The Commemorative Association for the Japan World Exp.; US Air Force Office of Scientific Research; The Kao Foundation for Arts and Sciences; The Asahi Glass Foundation (SPIE):
[6] Laser welding of polymers using high power diode lasers
Bachmann, FG
Russek, UA
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS, 2002, 4637 : 505 - 518
[7] Advances in laser soldering using high power diode lasers
Hoult, AP
McLenaghan, AJ
Rathod, J
FIRST INTERNATIONAL SYMPOSIUM ON HIGH-POWER LASER MACROPROCESSING, 2003, 4831 : 71 - 76
[8] High-power diode lasers
Wolff, D
PHOTONICS SPECTRA, 2000, 34 (01) : 91 - 92
[9] Coating with high power diode lasers
Molpeceres, JL
Tomas, MJ
Perez, B
Leal, L
REVISTA DE METALURGIA, 1998, 34 (02) : 170 - 174
[10] High power diode lasers and their applications
Du, KM
LASER PROCESSING OF MATERIALS AND INDUSTRIAL APPLICATIONS II, 1998, 3550 : 450 - 459

← 1 2 3 4 5 →