Phase field fracture models to predict crack initiation and propagation in anti-reflective coatings

被引:10
|
作者
Praud, F. [1 ,2 ]
Schmitt, T. [1 ]
Zabeida, O. [1 ]
Maiza, S. [3 ]
Martinu, L. [1 ]
Levesque, M. [2 ]
机构
[1] Polytech Montreal, Funct Coating & Surface Engn Lab, Dept Engn Phys, 2500 Chemin Polytech, Montreal, PQ H3T 1J4, Canada
[2] Polytech Montreal, Lab Multiscale Mech, Dept Mech Engn, 2500 Chemin Polytech, Montreal, PQ H3T 1J4, Canada
[3] Essilor Inc Corp, 81 Blvd Jean Baptiste Oudry, F-94000 Creteil, France
基金
加拿大自然科学与工程研究理事会;
关键词
Phase field fracture; Anti-reflective coatings; Finite element simulation; Mechanical strength performance; GRADIENT-ENHANCED DAMAGE; FINITE-ELEMENT-METHOD; BRITTLE-FRACTURE; MECHANICAL PROPERTIES; THIN-FILMS; FORMULATION; BEHAVIOR; FAILURE; STRESS; INTERFACE;
D O I
10.1016/j.tsf.2021.138920
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The performance of optical coating systems are frequently limited by the formation of defects and cracks, hence deteriorating the optical properties, film integrity and durability. Typical anti-reflective coating systems consist of inorganic low index and high index thin oxide films (e.g., SiO2 and ZrO2) on polymeric substrates that can be subjected to complex strain states induced by environmental effects such as thermal excursions or even by the manufacturing process. Any crack in the multi-layer stack is likely to be problematic in terms of optical performance and visual comfort for the wearer and also in terms of the mechanical durability of the stack. To overcome this limitation, the development of predictive tools is essential to improve the design of coatings systems while complementing experimental analyses. Thus, in this work, we performed numerical simulations by means of phase field fracture models relying on the finite element method and the energy minimization principle. Specifically, we developed and implemented a modelling strategy that can be applied as a readily usable dimensioning tool with a potential to optimize and predict the mechanical behaviour of optical coating systems upon crack initiation and propagation.
引用
收藏
页数:14
相关论文
共 50 条
  • [1] Anti-reflective coatings
    Lamb, Jim
    European Semiconductor, 1995, 17 (02):
  • [3] Anti-reflective and superamphiphilic coatings on polycarbonate
    Valentim, P. T.
    Retolaza, A.
    Llobet, J.
    Araujo, C.
    Cruz, S.
    Machado, C.
    Pontes, A. J., V
    Santos, H.
    Sousa, P. C.
    OPTICAL MATERIALS, 2022, 133
  • [4] Anti-reflective optical coatings incorporating nanoparticles
    Krogman, KC
    Druffel, T
    Sunkara, MK
    NANOTECHNOLOGY, 2005, 16 (07) : S338 - S343
  • [5] Anti-reflective polymer coatings in optical microlithography
    De, B
    Malik, S
    Dilocker, S
    Spaziano, G
    Biafore, J
    Bowden, M
    JOURNAL OF MACROMOLECULAR SCIENCE-PURE AND APPLIED CHEMISTRY, 2002, 39 (1-2): : 1 - 16
  • [6] Optimization of anti-reflective coatings for lithography applications
    Bauer, J
    Fursenko, O
    Virko, S
    Kuck, B
    Grabolla, T
    Melnik, V
    Mehr, W
    EMLC 2005: 21st European Mask and Lithography Conference, 2005, 5835 : 263 - 272
  • [7] Wet developable bottom anti-reflective coatings
    Hatanaka, T
    Kimura, S
    Enomoto, T
    Nakajima, Y
    ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXI, PTS 1 AND 2, 2004, 5376 : 655 - 663
  • [8] Photochemical studies on bottom anti-reflective coatings
    Guerrero, Douglas J.
    Mercado, Ramil
    Washburn, Carlton
    Meador, Jim
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2006, 19 (03) : 343 - 347
  • [9] Dichroic and anti-reflective coatings for astronomical instrumentation
    Michel, C.
    Barthelemy, E.
    Hofman, D.
    Pinard, L.
    Sassolas, B.
    Teillon, J.
    Cagnoli, G.
    ADVANCES IN OPTICAL AND MECHANICAL TECHNOLOGIES FOR TELESCOPES AND INSTRUMENTATION III, 2018, 10706
  • [10] General optimization of tapered anti-reflective coatings
    Good, Brandon L.
    Simmons, Shaun
    Mirotznik, Mark
    OPTICS EXPRESS, 2016, 24 (15): : 16618 - 16629