Direct Fabrication of Uniform and High Density Sub-10-nm Etching Mask Using Ferritin Molecules on Si and GaAs Surface for Actual Quantum-Dot Superlattice

被引：17

作者：

Igarashi, Makoto ^{[1
,4
]}

Tsukamoto, Rikako ^{[1
,4
]}

Huang, Chi-Hsien ^{[1
,4
]}

Yamashita, Ichiro ^{[2
,3
,4
]}

Samukawa, Seiji ^{[1
,4
]}

机构：

[1] Tohoku Univ, Inst Fluid Sci, Sendai, Miyagi 9808577, Japan

[2] Nara Inst Sci & Technol, Grad Sch Mat Sci, Nara 6300101, Japan

[3] Panasonic, ATRL, Kyoto 6190237, Japan

[4] Japan Sci & Technol Agcy, CREST, Tokyo 1020075, Japan

来源：

APPLIED PHYSICS EXPRESS | 2011年 / 4卷 / 01期

关键词：

2-DIMENSIONAL ORDERED ARRAY; SOLAR-CELLS; EFFICIENCY; THRESHOLD; SILICON; LASER;

D O I：

10.1143/APEX.4.015202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Direct formation of a uniform, closely packed, and high-density two-dimensional array of ferritin molecules was successfully achieved on Si and GaAs substrates by modifying the surface using neutral beam oxidation, whereas the same protocol produced a low density and disorded array on thermal silicon oxide. The surfaces of neutral-beam-oxidized SiO(2) and GaAs and thermal silicon oxide were characterized, and the mechanism of ferritin array formation was investigated. The experimental results strongly suggested that the surface hydrophilicity realized by the neutral beam oxidation is essential for the formation of an ordered and high-density two-dimensional array of ferritin molecules. (C) 2011 The Japan Society of Applied Physics

引用

页数：3