X-ray fluorescence wafer analyzer improves semiconductor fabrication

被引：0

作者：

Reader, A ^{[1
]}

Nieuwenhuizen, K ^{[1
]}

机构：

[1] PHILIPS ANALYT XRAY,NL-7602 EA ALMELO,NETHERLANDS

来源：

SOLID STATE TECHNOLOGY | 1996年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SGS Thomson (ST) Microelectronics' wafer fab in Crolles, France, is a Fully operational production facility for integrated circuits in Europe. The center includes the latest metrology and process-control systems, including wavelength-dispersive x-My fluorescence (WD XRF) wafer analyzer equipment from philips. Originally purchased to speed up the monitoring of phosphor silicate glass (PSG) and boron PSG (BPSG) planarization layers, the equipment is also used to measure composition and thickness of other layers, particularly TiN, as well as other metals, nitrides, and silicides.

引用

页码：S16 / S19

页数：4

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