Analysis of decomposed layer appearing on the surface of barium strontium titanate

被引：41
|
作者：
Fujisaki, Y [1 ]
Shimamoto, Y [1 ]
Matsui, Y [1 ]
机构：
[1] Hitachi Ltd, Cent Res Lab, Tokyo 1858601, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1999年 / 38卷 / 1AB期
关键词：
BST; XPS; decomposition; nitric acid; surface treatment; humidity;
D O I：
10.1143/JJAP.38.L52
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Chemical states and structures of thin degenerated layers grown on the surface of (Ba, Sr)TiO3 (BST) films are investigated by X-ray photoelectron spectroscopy (XPS). It was found that decomposition occurred as a result of the air exposure and also as a result of annealing. A careful study of a Ba 3d peak in the XPS spectrum reveals that Ba in BST crystal easily decomposes out of the perovskite phase and makes BaCO3 or barium oxides, whereas no significant change occurs in Sr, or Ti oxides. This degenerated layer can be removed by nitric acid treatment. It was also found that the surface BST becomes rather stable against exposure to air compared with the original one after the nitric acid treatment.
引用
收藏
页码：L52 / L54
页数：3
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