Electromagnetic parameters measurement for thin film materials

被引：0
|
作者：
Wu, Yunqiu [1 ]
Tang, Zongxi [1 ]
Zhang, Biao [1 ]
He, Xi [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Elect Engn, Chengdu 610054, Peoples R China
来源：
2008 INTERNATIONAL CONFERENCE ON MICROWAVE AND MILLIMETER WAVE TECHNOLOGY PROCEEDINGS, VOLS 1-4 | 2008年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new method is proposed in this paper to measure the electromagnetic parameters of thin film materials. The multiple microstrip is used as measure configuration. The formulations are deduced to calculate the electromagnetic parameters of the thin films, and the commercial software IE3D is used to obtain the S-parameters of the configuration. The results show that, by using this proposed method, the error of the real part of permeability is less than 5% and the error of the imaginary part of permeability is below 0.05.
引用
收藏
页码：627 / 629
页数：3
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