Nanoindentation study of magnetron-sputtered CrN and CrSiN coatings

CrN and CrSiN coatings were deposited on stainless steel substrate by reactive magnetron sputtering. The coatings were characterized for phases, chemical composition, microstructure, and mechanical properties by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM)/energy dispersive spectroscopy (EDS), atomic force microscopy (AFM), and nanoindentation technique, respectively. The cubic phase was the only phase observed in both the coatings as observed in XRD results. A dense morphology was observed in these coatings deposited with high nitrogen and Si contents, 50:50 and 18.65 at.%, respectively. Nanoindentation measurement of CrN coatings, with Ar + N-2 proportions of 60:40, showed maximum hardness (H) and modulus (E) of 21 +/- 0.85 GPa and 276 +/- 13 GPa, respectively. The CrN coatings deposited in pure N-2 atmosphere showed H and E values of 27 +/- 1.62 and 241 +/- 10 GPa, respectively. The measured H and E values of CrSiN coatings were found to be 28 +/- 1.40 GPa and 246 +/- 10 GPa, respectively. The improved hardness in both the coatings was attributed mainly to a reduction in crystallite size, decrease in surface roughness, and dense morphology. The incorporation of Si into the CrN coatings has improved both hardness and Young's modulus. (C) 2011 Elsevier Ltd. All rights reserved.