Development and applications of metal silicides

被引：0
|
作者：
Ma, Q [1 ]
Yan, BJ
Kang, MK
Yang, YQ
机构：
[1] Gansu Univ Technol, Dept Mat Engn, Lanzhou 730050, Peoples R China
[2] Northwestern Polytech Univ, Xian 710072, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 1999年 / 28卷 / 01期
关键词：
metal silicide; alloying; composite; application; development;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present status of metal silicides for use as heating elements, high temperature oxidation - resistant coatings as well as thin films for largescale integrated circuit applications are reviewed. Some applications problems and solutions to them are discussed. Research and development of the metal silicides as a new type of high - temperature structural materials are also overviewed.
引用
收藏
页码：10 / 13
页数：4
相关论文
共 17 条
  • [1] ANTON DL, 1989, JOM, V9, P17
  • [2] BIZSARRI V, 1989, AM CERAM SOC B, V68, P1834
  • [3] DESIGN AND PRODUCTION OF THE ZR3TI2SI3 INTERMETALLIC COMPOUND
    CELIS, PB
    KAGAWA, E
    ISHIZAKI, K
    [J]. JOURNAL OF MATERIALS RESEARCH, 1991, 6 (10) : 2077 - 2083
  • [4] GAS-ATOMIZED EUTECTIC INTERMETALLICS BASED ON (TI,NB)3(AL,SI) AND (TI,NB)5(SI,AL)3 .1. MICROSTRUCTURAL STUDIES
    ESSOUNI, M
    WAGNER, R
    BEAVEN, PA
    SCHIMANSKY, FP
    GERLING, R
    [J]. SCRIPTA METALLURGICA ET MATERIALIA, 1992, 26 (05): : 727 - 732
  • [5] FROMMEYER G, 1990, Z METALLKD, V81, P307
  • [6] KUMAR KS, 1993, JOM, V7, P28
  • [7] MA Qin, 1996, RARE METAL MAT ENG, V25, P30
  • [8] STRENGTH AND TOUGHNESS OF A NB/NB5SI3 COMPOSITE
    MENDIRATTA, MG
    DIMIDUK, DM
    [J]. METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1993, 24 (02): : 501 - 504
  • [9] Meyer JS, 1996, CEREBROVAS BRAIN MET, V8, P1
  • [10] MOORE JJ, 1994, JOM, V11, P72
12