Polymer filling ratio with various pressure variation rates in nanoimprint lithography (vol 131, pg 24, 2015)

被引：0
|
作者：
Ryu, JiHyeong [1 ]
Lim, HyungJun [1 ,2 ]
Lee, Sang-Ho [3 ]
Lee, JaeJong [1 ,2 ]
机构：
[1] Univ Sci & Technol, Dept Nano Mechatron, Taejon 305807, South Korea
[2] Korea Inst Machinery & Mat, Nanoconvergence & Mech Syst Res Div, Taejon 305343, South Korea
[3] Wonkwang Univ, Div Mech & Automot Engn, Iksan 570749, South Korea
来源：
MICROELECTRONIC ENGINEERING | 2015年 / 134卷
关键词：
D O I：
10.1016/j.mee.2014.12.005
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：68 / 68
页数：1
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