Implementation of a New Capacitive Touch Sensor Using the Nanoporous Anodic Aluminum Oxide (np-AAO) Structure

被引：13

作者：

Hong, Chitsung ^{[1
]}

Chu, Lian ^{[2
]}

Lai, Weicheng ^{[1
]}

Chiang, Ann-Shyn ^{[2
,3
]}

Fang, Weileun ^{[1
,4
]}

机构：

[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 300, Taiwan

[2] Natl Tsing Hua Univ, Inst Biotechnol, Hsinchu 300, Taiwan

[3] Natl Tsing Hua Univ, Brain Res Ctr, Hsinchu 300, Taiwan

[4] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 12期

关键词：

np-AAO (nanoporous anodic aluminum oxide); capacitive sensor; nanocapacitor; touch sensor; nanotexture films; CARBON NANOTUBES; ARRAYS; FABRICATION; FILM; MEMBRANES;

D O I：

10.1109/JSEN.2011.2160255

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study reports the implementation of a high-performance capacitive-type touch sensor by using the nanoporous anodic aluminum oxide (np-AAO) layer. The np-AAO layer is batch fabricated as the template to enable the direct formation of nanotexture metal film after deposition. The np-AAO is also exploited as the dielectric layer. Thus, the integration of np-AAO layer and the nanotexture metal film is employed to realize a metal-insulator-metal parallel-plate capacitance sensor. The sensitivity of the capacitive-type touch sensor is enhanced by the nanostructures. In application, the Au and Al metal layers and np-AAO are fabricated on Si substrate to form the parallel-plate capacitor. The testing demonstrates the np-AAO-based touch sensor has higher sensitivity. In addition, the detection of small object such as Drosophila using the fabricated np-AAO-based touch sensor is also demonstrated.

引用

页码：3409 / 3416

页数：8

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