Research on Preparation and Properties of TiNi/ZnO Intelligent Thin Films

被引：0
|
作者：
Zeng Guang [1 ,2 ]
Li Ziquan [2 ]
Zhou Hengzhi [2 ]
机构：
[1] NW Inst Nonferrous Met Res, Natl Engn Res Ctr Rare Met Proc, Xian 710016, Peoples R China
[2] Nanjing Univ Aeronaut & Astronaut, Nanjing 210016, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2010年 / 39卷 / 08期
关键词：
intelligent thin films; RF magnetron sputtering; TiNi/ZnO multilayer thin films; microstructure; damping capability; TRANSFORMATION; FABRICATION;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Quartz/ZnO/TiNi and quartz/TiNi/ZnO multilayer films were prepared by RF magnetron sputtering process on the quartz substrate. The phase composition, microstructure and mechanical properties of the multilayer films were investigated by XRD, SEM and scratch test methods, respectively. The change rule of the damping capability with the frequency and amplitude was investigated by DMA for quartz/TiNi and quartz/ZnO/TiNi multilayer films. Results show that the frequency response of quartz/TiNi is within 10 Hz, while that of quartz/ZnO/TiNi almost reaches to 20 Hz. The damping amplitude of quartz/ZnO/TiNi is 1.0 V, while that of quartz/TiNi is only 0.6 V. The damping capability of quartz/ZnO/TiNi is superior to that of quartz/TiNi. The critical adhesion forces between the multilayer thin film and quartz substrate for quartz/ZnO/TiNi and quartz/TiNi are 45.75 N and 40.15 N, respectively.
引用
收藏
页码：1447 / 1450
页数：4
相关论文
共 10 条
  • [1] Structural and optical properties of sputtered ZnO films
    Bachari, EM
    Baud, G
    Ben Amor, S
    Jacquet, M
    [J]. THIN SOLID FILMS, 1999, 348 (1-2) : 165 - 172
  • [2] Sputter deposition of NiTi thin film shape memory alloy using a heated target
    Ho, KK
    Carman, GP
    [J]. THIN SOLID FILMS, 2000, 370 (1-2) : 18 - 29
  • [3] CHARACTERISTICS OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON-MODE ELECTRON-CYCLOTRON-RESONANCE SPUTTERING
    INUKAI, T
    MATSUOKA, M
    ONO, K
    [J]. THIN SOLID FILMS, 1995, 257 (01) : 22 - 27
  • [4] Jardine A. P., 1994, Smart Materials and Structures, V3, P140, DOI 10.1088/0964-1726/3/2/009
  • [5] Fabrication of TiNi/PZT heterostructure films for smart systems
    Kim, IJ
    Lee, HW
    [J]. SCRIPTA MATERIALIA, 2001, 44 (03) : 525 - 530
  • [6] THIN-FILM MULTILAYERS OF FERROELASTIC TINI-FERROELECTRIC PZT - FABRICATION AND CHARACTERIZATION
    MERCADO, PG
    JARDINE, AP
    [J]. JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 1995, 6 (01) : 62 - 70
  • [7] Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films
    Miyazaki, S
    Ishida, A
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1999, 273 : 106 - 133
  • [8] Smart materials and structures: What are they?
    Spillman, WB
    Sirkis, JS
    Gardiner, PT
    [J]. SMART MATERIALS & STRUCTURES, 1996, 5 (03): : 247 - 254
  • [9] Effect of the composition and thermal annealing on the transformation temperatures of sputtered TiNi shape memory alloy thin films
    Surbled, P
    Clerc, C
    Le Pioufle, B
    Ataka, M
    Fujita, H
    [J]. THIN SOLID FILMS, 2001, 401 (1-2) : 52 - 59
  • [10] ZHENG CQ, 2004, TESTING MECH, V19, P248
1