Preparation and properties of lithium-doped K0.5Na0.5NbO3 thin films by chemical solution deposition

Lithium doped K(0.5)Na(0.5)NbO(3) films were fabricated by chemical solution deposition on Pt/TiO(2)/SiO(2)/Si substrates. Homogeneous and stable precursor solutions were prepared by controlling the reaction of starting metal alkoxides. Perovskite KNN single phase thin films were successfully synthesized on Pt/TiO(x)/SiO(2)/Si substrates. The.1.2 mu m-thick KLNN film annealed at 650 degrees C exhibited a ferroelectric polarization hysteresis loops at -250 degrees C. The loop at room temperature is round in shape indicating the film contains leakage components. Dielectric constant under zero bias is 490 at room temperature. Typical upside-down butterfly DC bias-capacitance curve was obtained in the KLNN film capacitors at room temperature, indicating polarization reversal occurs in the obtained KLNN films.