Observation of characteristics of magnetic neutral loop discharge plasma appearing at antenna in RF circuit

被引：9
|
作者：
Tsuboi, Hideo [1 ]
Ogata, Seiji [1 ]
机构：
[1] ULVAC Inc, Kanagawa 2538543, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 11期
关键词：
magnetic neutral loop discharge; NLD; inductively coupled plasma; ICP; high voltage; antenna; V-pp; plasma diagnostics; equivalent circuit;
D O I：
10.1143/JJAP.46.7475
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The characteristics of magnetic neutral loop discharge (NLD) plasma have been studied by measurement of a high voltage appearing at an antenna in RF circuit. Peak-to-peak voltage V, at the antenna coil supplying power into plasma varied depending on the configuration and strength of the magnetic field. By analysis of the measured V, using the equivalent circuit model, it is deduced quantitatively that the power deposited into plasma in NLD is larger than that deposited in inductively coupled plasma (ICP).
引用
收藏
页码：7475 / 7477
页数：3
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