Temperature dependence of vibrational spectra of H-point defect complexes and H2* in Si -: art. no. 085205

被引:2
|
作者
Suezawa, M
Fukata, N
Takahashi, T
Saito, M [1 ]
Yamada-Kaneta, H
机构
[1] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
[2] Fujitsu Labs Ltd, Atsugi, Kanagawa 2430197, Japan
[3] NEC Informatec Syst Ltd, Tsukuba, Ibaraki 3058501, Japan
关键词
D O I
10.1103/PhysRevB.64.085205
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Temperature dependences of optical-absorption spectra due to H vibration included in H-point defect complexes and H-2* in Si were investigated. Specimens were doped with H by annealing in H-2 gas followed by quenching. They were then irradiated with 3-MeV electrons at room temperature. Optical-absorption spectra of H-point defect complexes and H-2* were measured between 7 K and room temperature. The peaks investigated were those at 1838 cm(-1) [H-2*(AB)], 1870 cm(-1) (I2H2), 1987 cm(-1) (IH2), 2062 cm(-1) [H2*(BC)], 2073 cm(-1) (V2H2), and 2122 and 2145 cm(-1) (VH2); the complexes in parentheses are responsible for optical-absorption peaks and I, V, AB, and BC denote a self-interstitial, a vacancy, an antibonding site and a bond-centered site, respectively. The temperature-dependent peak positions and linewidths of V-related complexes, H-2*(AB) and I2H2 are well explained by the dephasing relaxation due to an anharmonic coupling of H vibration to one low-frequency mode. On the other hand, the interaction with all phonons in the relaxation explains those of H-2*(AB), H-2*(BC), and V2H2. These two models were not applicable to IH2.
引用
收藏
页码:852051 / 852057
页数:7
相关论文
共 50 条
  • [1] Stereochemistry on Si(001):: Angular dependence of H2 dissociation -: art. no. 076107
    Dürr, M
    Höfer, U
    PHYSICAL REVIEW LETTERS, 2002, 88 (07) : 4
  • [2] Key to understanding interstitial H2 in Si -: art. no. 105507
    Chen, EE
    Stavola, M
    Fowler, WB
    Walters, P
    PHYSICAL REVIEW LETTERS, 2002, 88 (10) : 4
  • [3] Stability and vibrational modes of H2 and H2* complexes in Si
    Kim, YS
    Jin, YG
    Jeong, JW
    Chang, KJ
    PHYSICA B-CONDENSED MATTER, 1999, 273-4 : 231 - 234
  • [4] Formation and annihilation of H-point defect complexes in quenched Si doped with C
    Fukata, N
    Suezawa, M
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (08) : 4525 - 4530
  • [5] Local vibrational modes of H2 and H2* complexes in crystalline Si
    Kim, YS
    Jin, YG
    Jeong, JW
    Chang, KJ
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1999, 14 (12) : 1042 - 1047
  • [6] Optical absorption due to H-point defect complexes in quenched Si doped with C
    Fukata, N
    Suezawa, M
    PHYSICA B-CONDENSED MATTER, 1999, 273-4 : 247 - 250
  • [7] Pd/H system in H2 plasmas -: art. no. 043304
    Di Pascasio, F
    Gozzi, D
    Panella, B
    Trionfetti, C
    JOURNAL OF APPLIED PHYSICS, 2005, 97 (04)
  • [8] Infrared spectra of CO2-H2 complexes -: art. no. 174313
    McKellar, ARW
    JOURNAL OF CHEMICAL PHYSICS, 2005, 122 (17):
  • [9] Atomistic view of the recombinative desorption of H2 from H/Si(100) -: art. no. 196103
    Ferng, SS
    Lin, CT
    Yang, KM
    Lin, DS
    Chiang, TC
    PHYSICAL REVIEW LETTERS, 2005, 94 (19)
  • [10] Optical absorption due to H-point defect complexes in quenched Si doped with C
    Fukata, Naoki
    Suezawa, Masashi
    Physica B: Condensed Matter, 1999, 273 : 247 - 250