Peculiarities of gas chromatographic analysis of 6N4 volatile hydrides using a helium ionization detector operated in the ionization amplification mode

被引:2
|
作者
Skosyrev, A. I. [1 ]
Pushkarev, G. V. [1 ]
Ermolaev, S. V. [1 ]
Polezhaev, D. M. [1 ]
Chernyatin, A. K. [1 ]
机构
[1] Res & Dev Enterprise Salut, Nizhnii Novgorod 603950, Russia
关键词
volatile inorganic hydrides; analysis; oxygen and nitrogen impurities; gas chromatography; helium ionization detector; ionization amplification mode; accuracy of measurement results;
D O I
10.1134/S106193481710015X
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A pneumovacuum circuit of a Tsvet-800-2 gas chromatograph with a helium ionization detector (HID) in the ionization amplification mode is proposed for controlling limiting trace impurities in ammonia, arsine, monosilane, and phosphine of grade 6N4. The conditions for the preparation and reliable operation of the chromatograph with the HID are systematized. The effect of an additive of (0.0-17.6) x 10(-4) mol % of hydrogen in the carrier gas of the detector on the polarity of its signal on the impurities of oxygen and nitrogen at a level of (0.5-20.0) x 10(-5) mol % is studied. Methods are proposed for eliminating systematic errors in the determination of the concentration of oxygen and nitrogen in the range from 0.5 x 10(-5) to 1 x 10(-3) mol % in 6N4 volatile hydrides, caused by "counter" impurities in the carrier gas, the mechanism of the heteropolar sensitivity of the HID, and irreversible chemical reactions of oxygen traces with phosphine and products of its decomposition on a CaA-ShM zeolite in a separating column of a chromatograph. Gas chromatography analysis of ammonia, arsine, monosilane, and phosphine of grade 6N4 was carried out.
引用
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页码:1082 / 1088
页数:7
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