共 50 条
- [1] Inline temperature compensation for dimensional metrology of polymer parts in a production environment based on 3D thermomechanical analysis PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 53 : 46 - 53
- [2] In-line metrology of 3D interconnect processes METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVI, PTS 1 AND 2, 2012, 8324
- [3] In-line quality control using dimensional metrology of 3D metal parts printed by laser beam melting NONDESTRUCTIVE CHARACTERIZATION AND MONITORING OF ADVANCED MATERIALS, AEROSPACE, CIVIL INFRASTRUCTURE, AND TRANSPORTATION XIII, 2019, 10971
- [4] Adaptive Measurement and Modelling Methodology for In-line 3D Surface Metrology Scanners COMPLEX SYSTEMS ENGINEERING AND DEVELOPMENT, 2017, 60 : 26 - 31
- [5] In-Line Raman Spectroscopy: High-Throughput Strain Metrology for 3D Devices 2022 33RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2022,
- [6] Hardware Based Error compensation in 3D Optical Metrology Systems NINTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY, PTS 1 AND 2, 2008, 7155
- [7] In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by In-Line 3D Atomic Force Microscope SIGE, GE, AND RELATED MATERIALS: MATERIALS, PROCESSING, AND DEVICES 7, 2016, 75 (08): : 761 - 767
- [8] Revisiting 3D X-ray for Board Level FA to In-line Metrology of Wafer Level Integration 2024 IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS, IPFA 2024, 2024,
- [9] In-line plasma treatment for 3D plastics parts - Rapid plasma activation in the medium pressure range KUNSTSTOFFE-PLAST EUROPE, 2001, 91 (06): : 46 - +