Two-dimensional stage self-calibration: Role of symmetry and invariant sets of points

被引：0
|
作者：
Raugh, MR [1 ]
机构：
[1] Interconnect Technol Corp, Mt View, CA 94040 USA
来源：
PROCEEDINGS OF THE THIRTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1998年
关键词：
self-calibration; reversals; separation of errors; positional metrology; geometric invariants; orbits; Bravais lattices;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：19 / 19
页数：1
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