Highly sensitive SnO2-based gas sensor for indoor air quality monitoring

被引：0

作者：

Shi, LQ ^{[1
]}

Gao, W ^{[1
]}

Hasegawa, Y ^{[1
]}

Katsube, T ^{[1
]}

Nakano, M ^{[1
]}

Nakamura, K ^{[1
]}

机构：

[1] Saitama Univ, Fac Engn, Urawa, Saitama 338, Japan

来源：

INDOOR AIR 2005: PROCEEDINGS OF THE 10TH INTERNATIONAL CONFERENCE ON INDOOR AIR QUALITY AND CLIMATE, VOLS 1-5 | 2005年

关键词：

SnO(2); gas sensor; indoor air monitoring; HCHO; NO(2); FORMALDEHYDE;

D O I：

暂无

中图分类号：

TU [建筑科学];

学科分类号：

0813 ;

摘要：

The present work is concerned on developing a high performance and reliable SnO(2)-based gas sensor to detect HCHO and NO(2) gas for indoor environmental monitoring. The sensors were fabricated with the radio-frequency induction plasma deposition (IPD) method. SEM (Scanning Electron Microscope) and XRD (X-Ray Diffraction) method were used to examine the physical properties of the sensing films. The obtained sensors showed high sensitivities to HCHO and NO(2) gas at extremely low concentration 20 ppb (parts-per-billion) with rapid response and recovery time less than several minutes. Finally, the temperature dependency of the sensors was described in the paper. The results indicated that the fabricated sensors are promising for monitoring indoor air pollution.

引用

页码：3385 / 3388

页数：4

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