TOWARDS 3-AXIS FM MEMS GYROSCOPES: MECHANICAL DESIGN AND EXPERIMENTAL VALIDATION

被引：0
|
作者：
Zega, Valentina [1 ]
Comil, Claudia [1 ]
Bordiga, Elia [2 ]
Langfelder, Giacomo [2 ]
Falorni, Luca [3 ]
Corigliano, Alberto [1 ]
机构：
[1] Politecn Milan, Dept Civil & Environm Engn, Milan, Italy
[2] Politecn Milan, Dept Elect Informat & Bioengn, Milan, Italy
[3] STMicroelectronics, AMG Res & Dev, Cornaredo, Italy
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
关键词：
Micro-Electro-Mechanical Systems; gyroscopes; Frequency Modulation (FM); 3-axis sensor;
D O I：
10.1109/transducers.2019.8808626
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Frequency Modulation (FM) has been studied as an innovative working principle for Micro-Electro-Mechanical Systems (MEMS) gyroscopes and as a smart solution for the scale factor stability against environmental fluctuations. In this work, three tuning-fork structures arc proposed for a yaw, pitch and monolithic 3-axis FM gyroscope, respectively. Preliminary experimental measurements of the scale factors of the FM gyroscopes prove the expected behavior of the devices. In particular, in this work we show the first experimental proof of a monolithic 3-axis FM gyroscope.
引用
收藏
页码：1933 / 1936
页数：4
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