The effect of microstructure on the electrical properties of PZT thin films

被引：0
|
作者：
Foschini, CR [1 ]
Fernández, JF [1 ]
Stojanovic, BD [1 ]
Varela, JA [1 ]
机构：
[1] MIT, Cambridge, MA 02139 USA
来源：
MORPHOTROPIC PHASE BOUNDARY PEROVSKITES, HIGH STRAIN PIEZOELECTRICS, AND DIELECTRIC CERAMICS | 2003年 / 136卷
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D O I：
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中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Lead zirconate titanate solutions were prepared using a polymeric precursor method. Films with 200 to 700 nm thickness were deposited onto Si/Pt substrates and thermally treated between 400 and 700degreesC during 1h. The crystallization was studied by X-ray diffraction: and scanning electron microscopy. On heating the organic precursors decompose and at 500degreesC a polycrystalline PZT phase is formed with a, rhombohedral and tetragonal structures depending on the stoichiometry of initial solution. The electrical Measurements were carried out and the ferroelectric properties with temperature and titanium amount were investigated.
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页码：489 / 495
页数：7
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