A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications

被引：0

作者：

Mai, Linh ^{[1
]}

Lee, Jae-Young ^{[1
]}

Pharn, Van-Su ^{[1
]}

Yoon, Giwan ^{[1
]}

机构：

[1] ICU, Sch Engn, Taejon 305732, South Korea

来源：

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2008年 / 50卷 / 02期

关键词：

Bragg reflector; FBAR device; Q-factor; return loss; WiMAX applications; RESONANCE CHARACTERISTICS; BRAGG REFLECTORS; IMPROVEMENTS;

D O I：

10.1002/mop.23088

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin-film Cr adhesion layers between W and SiO2 film layers in the Bragg reflectors, particularly to enhance the adhesion in-between. As a result, the resonances were found to occur at 2.7-3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q-factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. (C) 2007 Wiley Periodicals, Inc.

引用

页码：375 / 378

页数：4

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