Corner Effect of Micro-Comb Capacitive Structure

被引：0
|
作者：
Liu, Haipeng [1 ]
Gao, Shiqiao [1 ]
Jin, Lei [2 ]
He, Yunli [2 ]
机构：
[1] Beijing Inst Technol, State Key Lab Explos Sci & Technol, Beijing, Peoples R China
[2] Beijing Inst Technol, Sch Mech Engn, Beijing, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XV | 2014年 / 609-610卷
关键词：
Comb capacitor; Micro-machined gyroscope; Coner effect;
D O I：
10.4028/www.scientific.net/KEM.609-610.831
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The comb-shaped capacitive micro-machined gyroscope employing an electrostatic comb drive and capacitive sensing structure is a typical type of MEMS sensor. Because of design and processing limitation and other factors, there are problems related to parallelism, dimensional accuracy and shape accuracy of the fabricated comb capacitor. These problems induce error into the calculation of the capacitance of the comb capacitor. The capacitance of the comb capacitor can be better calculated by the modeling the corner effect with various equipotential lines.
引用
收藏
页码：831 / +
页数：2
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