REDUCED ORDER MODEL FOR MEMS CANTILEVER RESONATORS UNDER SOFT AC VOLTAGE NEAR NATURAL FREQUENCY

被引：0

作者：

Caruntu, Dumitru I. ^{[1
]}

Martinez, Israel ^{[1
]}

机构：

[1] Univ Texas Pan Amer, Dept Mech Engn, Edinburg, TX 78541 USA

来源：

INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 4, PTS A AND B | 2013年

关键词：

DYNAMIC PULL-IN; NONLINEAR RESPONSE; DESIGN;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator's natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

引用

页码：389 / 394

页数：6

共 30 条

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