Freestanding Silicon Photonic Ring and Disk Resonators

被引：0
|
作者：
Zhang, Yu [1 ,2 ]
Takabayashi, Alain Yuji [1 ]
Sattari, Hamed [1 ]
Quack, Niels [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland
[2] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China
来源：
2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2019年
关键词：
silicon photonics; ring/disk resonator; MEMS;
D O I：
10.1109/omn.2019.8925106
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high optical Q-factors up to 3.6x10(4) for both ring and disk resonators, and extinction ratios larger than 20 dB. These functional, freestanding resonators demonstrate the compatibility of MEMS processing within a silicon photonics platform and open the possibility for large-scale integration of more complex photonic devices.
引用
收藏
页码：212 / 213
页数：2
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