Deposition of large-area graded (Pb1-xLax)TiO3 thin films by pulsed laser depesition

被引:1
|
作者
Jamn, G [1 ]
Liu, KS
Lin, IN
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 30013, Taiwan
关键词
PLD; 2-step process; PLT; graded materials;
D O I
10.1080/10584580008215642
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thin films of the composition (Pb1-xLax)TiO3, PLT, with x=0.05, 0.10 and 0.15 were sequentially pulsed laser deposited on Pt(Si) substrates at 200 degreesC, followed by post-annealing at 550-600 degreesC in furnace to result in a film with graded composition. The ferroelectric properties of the graded materials are markedly different from those of the uniform thin PLT films. For down graded materials, which contain PLT5 composition (x=0.05) at the top and PLT15 composition (x=0.15) at the bottom of the films, the hysteresis loops are slim and the width of the P-E curves increases with voltage cycling, attaining an equilibrium polarization states similar to the P-E properties of PLT15 thin films. By contrast, the ferroelectric hysteresis properties reaches the same value as those of PLT5 thin films when the composition is up-graded.
引用
收藏
页码:77 / 86
页数:10
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