Preparing transparent cobalt-doped ZnO thin films by DC magnetron sputtering

被引：4

作者：

Panyajirawut, Pongladda ^{[1
]}

Pratumsuwan, Nattha ^{[1
]}

Meesombad, Kornkamon ^{[1
]}

Thanawattana, Kridsana ^{[1
]}

Chingsungnoen, Artit ^{[2
]}

Boonyopakorn, Narongchai ^{[3
,4
]}

Aiempanakit, Montri ^{[1
]}

Pecharapa, Wisanu ^{[5
]}

机构：

[1] Silpakorn Univ, Fac Sci, Dept Phys, Bangkok 73000, Nakhon Pathom, Thailand

[2] Mahasarakham Univ, Fac Sci, Technol Plasma Res Unit, Maha Sarakham 44150, Thailand

[3] Nakhon Pathom Rajabhat Univ, Fac Sci & Technol, Sci Program, Lanzhou 73000, Nakhon Pathom, Peoples R China

[4] Nakhon Pathom Rajabhat Univ, Res Unit Thin Film Coating Vacuum, Lanzhou 73000, Nakhon Pathom, Peoples R China

[5] King Mongkuts Inst Technol Ladkrabang, Coll Nanotechnol, Bangkok 10520, Thailand

来源：

MATERIALS TODAY-PROCEEDINGS | 2017年 / 4卷 / 05期

关键词：

cobalt-doped ZnO; thin films; sputtering; anneal; OPTICAL-PROPERTIES; THICKNESS;

D O I：

10.1016/j.matpr.2017.06.132

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of cobalt-doped ZnO were prepared by DC magnetron sputtering on glasses. The cobalt dopant concentration was at 3% wt. The sputtering power was set at 200 watts and sputtered for 20 mins. All films are transparent. The films were then annealed at 100-500 degrees C under air atmosphere. Crystal structural and optical properties of the films were characterized by XRD and UV-Vis, respectively. The XRD patterns show peaks corresponding to (002) plane indicate thin films obtain hexagonal wurtzite structure. The effects of annealing temperature on crystal structure and optical properties were discussed. (C) 2017 Elsevier Ltd. All rights reserved.

引用

页码：6311 / 6316

页数：6

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