Influence of resonance energy absorption on the properties of gas discharge maintained by asymmetric surface waves

The influence of wave energy absorption near discharge walls, where the plasma is inhomogeneous, on the properties of gas discharge maintained by asymmetric surface waves (SW) is studied. It is shown that resonance absorption can be a dominant process at the energy transmission from SW to plasma particles in low-pressure plasma maintained by high frequency SW. The efficiency of plasma production under low pressure can be increased by resonance heating. The resonance heating plays an important role in the case of large azimuthal numbers. An increasing resonance absorption is observed at small wavelengths for large radius plasma.