Measurement of the metal nanometer layer parameters on dielectric substrates using photonic crystals based on the waveguide structures with controlled irregularity in the microwave band

被引：13

作者：

Usanov, Dmitry ^{[1
]}

Skripal, Alexander ^{[1
]}

Abramov, Anton ^{[1
]}

Bogolubov, Anton ^{[1
]}

Skvortsov, Vladimir ^{[1
]}

Merdanov, Merdan ^{[1
]}

机构：

[1] Saratov NG Chernyshevskii State Univ, Fac Nano & Biomed Technol, Saratov 410012, Russia

来源：

2007 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4 | 2007年

关键词：

D O I：

10.1109/EUMC.2007.4405160

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The results of investigations of the possibility of utilization of microwave photonic crystals with tunable irregularity instead of a "quarter-wave" dielectric layer for measurement of parameters of metal nanometer layers on dielectric substrates are presented. It has been shown that tuning the irregularity in the periodical structure of a photonic crystal allows one to tune the range of measurable metal layer's thickness from 1 till 500 nm.

引用

页码：198 / 201

页数：4

共 18 条

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