Full fabrication simulation of 300mm wafer focused on AMHS (automated material handling systems)

Semiconductor fabrication lines are organized using bays, equipment, and stockers. Most 300mm wafer lines use ANMS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. The key concern for manufacturer is how to raise productivity and to reduce turnaround time, This paper presents a simulation to reduce turn around time and raise productivity by reducing the delivery time (which affects AMHS).