Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity

被引：183
|
作者：
Chen, Nannan [1 ]
Tucker, Craig [1 ]
Engel, Jonathan M. [1 ]
Yang, Yingchen [1 ]
Pandya, Saunvit [1 ]
Liu, Chang [1 ]
机构：
[1] Univ Illinois, Micro & Nanotechnol Lab, Micro & Nanotechnol Res Grp, Urbana, IL 61801 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2007年 / 16卷 / 05期
关键词：
biomechanics; microelectromechanical devices; piezoresistive devices; sensitivity; sensory aids; silicon;
D O I：
10.1109/JMEMS.2007.902436
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-mu m tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16 degrees is also achieved for the sensor's yaw response in air.
引用
收藏
页码：999 / 1014
页数：16
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