Determination of parameters of a contour of a solid surface in case of total external reflection of X-rays

The results of experimental and theoretical investigations of surface parameters of GaAs and SiO2 samples are presented and obtained by methods based on the phenomenon of X-ray total external reflection (TER). The influence of the surface-relief parameters on experimental integral and differential TER curves is analysed. The actual surface relief is reconstructed, and surface parameters are determined by developed method on the base of analysis of the obtained curves. The results of TER methods are in a good agreement with results of atomic-force microscopy measurements.