Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

被引：8
|
作者：
Bae, Joohyeon [1 ,2 ]
Lee, Hyunsuk [1 ,2 ]
Seo, Duckhyeon [1 ,2 ]
Yun, Sangdu [3 ]
Yang, Jeonghyeon [3 ]
Huh, Sunchul [1 ,2 ]
Jeong, Hyomin [1 ,2 ]
Noh, Jungpil [1 ,2 ]
机构：
[1] Gyeongsang Natl Univ, Dept Energy & Mech Engn, 2 Tongyeonghaean Ro, Tongyeong 53064, South Korea
[2] Gyeongsang Natl Univ, Inst Marine Ind, 2 Tongyeonghaean Ro, Tongyeong 53064, South Korea
[3] Gyeongsang Natl Univ, Dept Mech Syst Engn, 2 Tongyeonghaean Ro, Tongyeong 53064, South Korea
来源：
MATERIALS | 2020年 / 13卷 / 14期
基金：
新加坡国家研究基金会;
关键词：
TiNi thin film; shape memory alloy; grain size; phase transformation behavior;
D O I：
10.3390/ma13143229
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.
引用
收藏
页数：10
相关论文
共 50 条
  • [1] Mechanical behavior of nanostructured TiNi shape memory alloy with different grain size
    Resnina, Natalia
    Belyaev, Sergey
    Pilugin, Vitali
    Glazova, Diana
    MATERIALS TODAY-PROCEEDINGS, 2017, 4 (03) : 4841 - 4845
  • [2] Quantitative phase transformation behavior in TiNi shape memory alloy thin films
    Bo-Kuai Lai
    H. Kahn
    S. M. Phillips
    Z. Akase
    A. H. Heuer
    Journal of Materials Research, 2004, 19 : 2822 - 2833
  • [3] Quantitative phase transformation behavior in TiNi shape memory alloy thin films
    Lai, BK
    Kahn, H
    Phillips, SM
    Akase, Z
    Heuer, AH
    JOURNAL OF MATERIALS RESEARCH, 2004, 19 (10) : 2822 - 2833
  • [4] Dislocation and Phase Transformation in Thin Films of the Shape Memory Alloy TiNi
    Department of Materials Science, Jilin University, Changchun 130023, China
    不详
    Xiyou Jinshu Cailiao Yu Gongcheng, 4 (201):
  • [5] Dislocation and phase transformation in thin films of the shape memory alloy TiNi
    Shan, FL
    Huo, YL
    Teng, FG
    Wang, YM
    RARE METAL MATERIALS AND ENGINEERING, 1998, 27 (04) : 199 - 201
  • [6] Phase transformation of tini shape memory alloy under electron irradiation
    Wan, FR
    Zu, XT
    Wang, LM
    MATERIALS FOR ADVANCED ENERGY SYSTEMS AND FISSION AND FUSION ENGINEERING, PROCEEDINGS, 2003, : 259 - 262
  • [7] Influence of 60 keV proton irradiation on the transformation behavior of a TiNi shape memory alloy thin film
    Wang, Zhi-Guo
    Zu, Xiao-Tao
    Lei, Yu
    Mo, Hua-Qiang
    Fu, Yong-Qing
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2004, 16 (11): : 1473 - 1476
  • [8] Effects of proton irradiation on transformation behavior of TiNi shape memory alloy thin films
    Wang, ZG
    Zu, XT
    Fu, YQ
    Wu, JH
    Du, HJ
    THIN SOLID FILMS, 2005, 474 (1-2) : 322 - 325
  • [9] THIN-FILM PROCESSING OF TINI SHAPE MEMORY ALLOY
    WALKER, JA
    GABRIEL, KJ
    MEHREGANY, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 243 - 246
  • [10] MARTENSITE AND REVERSE TRANSFORMATION IN PRE-STRAINED TiNi SHAPE MEMORY ALLOY THIN FILM
    X.P.Liu
    M.Z.Cao
    R.Yang
    Acta Metallurgica Sinica(English Letters), 2003, (03) : 221 - 225
12345