Molecular dynamics study of void effect on nanoimprint of single crystal aluminum

被引:24
|
作者
Yuan, Ying [1 ]
Sun, Tao [1 ]
Zhang, Junjie [1 ]
Yan, Yongda [1 ]
机构
[1] Harbin Inst Technol, Ctr Precis Engn, Harbin 150006, Peoples R China
关键词
Nanoimprint; Molecular dynamics; Void volume fraction; Spring back; LITHOGRAPHY; IMPRINT; METALS; COPPER;
D O I
10.1016/j.apsusc.2011.03.073
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Pre-existing defects can alter mechanical behavior of materials significantly under applied load. In current study molecular dynamics (MD) simulations are performed to reveal pre-existing void effect on nanoimprint of single crystal Al thin films, such as deformation mechanism and spring back phenomenon. Current simulation results show void acts as strong barrier to dislocation motion, although plastic deformation is dominantly controlled by dislocation activities. It indicates the void volume fraction has strong influence on nanoimprint: the larger the void volume fraction, the smaller the maximum force required for initial dislocation nucleation, and the stronger the interaction between extended dislocation and void. It also demonstrates that there is a critical void volume fraction for minimum spring back, which is resulted from competition between two roles affecting dislocation annihilation. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:7140 / 7144
页数:5
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