LabView based virtual calorimetric etching solution analyzer (CESA) for the online quantification of hydrogen peroxide for the semiconductor industry

被引：2

作者：

Zlatev, Roumen ^{[1
]}

Ramos, Rogelio ^{[1
]}

Stoytcheva, Margarita ^{[1
]}

Valdez, Benjamin ^{[1
]}

Curiel, Mario ^{[1
]}

机构：

[1] Univ Autonoma Baja Calif, Inst Ingen, Mexicali 12280, Baja California, Mexico

来源：

INSTRUMENTATION SCIENCE & TECHNOLOGY | 2022年 / 50卷 / 04期

关键词：

Calorimetry; hydrogen peroxide; semiconductor etching; virtual instrumentation; ELECTROCHEMICAL DETERMINATION; H2O2; DETERMINATION; PRUSSIAN BLUE; SENSOR;

D O I：

10.1080/10739149.2021.2013876

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A virtual instrument, calorimetric etching solution analyzer based on LabVIEW 2010 platform was developed, characterized and validated for the on-line automated H2O2 concentration monitoring in SC-1 etching solution applied in the semiconductor industry. The virtual instrument completely controls all analyzer functions including sampling, analytical response measurement, digital data processing and H2O2 concentration calculation as well as the instrument calibration and real time concentration correction by fresh solution addition to the etching machine. The hardware, the software, the user interface and the instrument functioning are presented and discussed with the analytical characterization and validation by industrial sample analysis in comparison with a standard permanganate method.

引用

页码：397 / 413

页数：17

共 2 条

[1] Combined calorimetric gas- and spore-based biosensor array for online monitoring and sterility assurance of gaseous hydrogen peroxide in aseptic filling machines
Arreola, Julio
Keusgen, Michael
Wagner, Torsten
Schoening, Michael J.
BIOSENSORS & BIOELECTRONICS, 2019, 143
[2] Improving the robustness of a partial least squares (PLS) model based on pure component selectivity analysis and range optimization: Case study for the analysis of an etching solution containing hydrogen peroxide
Lee, Youngbok
Chung, Hoeil
Arnold, Mark A.
ANALYTICA CHIMICA ACTA, 2006, 572 (01) : 93 - 101

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