Effect of structure and deposition technology on tribological properties of DLC coatings alloyed with VIA group metals

被引：3
|
作者：
Khrushchov, M. [1 ]
Levin, I. [1 ,2 ]
Marchenko, E. [1 ]
Avdyukhina, V. [2 ]
Petrzhik, M. [3 ]
机构：
[1] Russian Acad Sci, Inst Machine Studies, Moscow 101990, Russia
[2] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia
[3] Natl Res Technol Univ MISiS, Moscow 119049, Russia
来源：
23RD INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY | 2016年 / 729卷
关键词：
D O I：
10.1088/1742-6596/729/1/012016
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The results of a comprehensive research on atomic structure, phase composition, micromechanical and tribological characteristics of alloyed DLC coatings have been presented. The coatings have been deposited by reactive magnetron sputtering in acetylene-nitrogen gas mixtures of different compositions (alpha-C:H:Cr), by plasma-assisted chemical vapor deposition in atmospheres of silicone-organic precursor gases (alpha-C:H:Mo:Si), and by nonreactive magnetron sputtering of a composite targe t(alpha-C:W).
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页数：5
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