Preparation and characterization of n-type conductive (Al, Co) co-doped ZnO thin films deposited by sputtering from aerogel nanopowders

被引：84
|
作者：
El Mir, L. [1 ]
Ben Ayadi, Z.
Saadoun, M.
Djessas, K.
von Bardeleben, H. J.
Alaya, S.
机构：
[1] Fac Sci Gabes, Lab Phys Mat Nanomat Appl Environm, Gabes 6072, Tunisia
[2] Univ Perpignan, Lab Mat Phys Syst, MEPS, F-66860 Perpignan, France
[3] Univ Paris 06, CNRS 7588, Inst Nanosci Paris, UMR, F-75015 Paris, France
来源：
APPLIED SURFACE SCIENCE | 2007年 / 254卷 / 02期
关键词：
sputtering; sol-gel method; zinc oxide; nanostructures; transparent conductive oxide (TCO);
D O I：
10.1016/j.apsusc.2007.06.028
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Highly transparent, n-type conducting ZnO thin films were obtained by low temperature magnetron sputtering of (Co, Al) co-doped ZnO nanocrystalline aerogels. The nanoparticles of similar to 30 nm size were synthesized by a sol-gel method using supercritical drying in ethyl alcohol. The structural, optical and electrical properties of the films were investigated. The ZnO films were polycrystalline textured, preferentially oriented with the (0 0 2) crystallographic direction normal to the film plane. The films show within the visible wavelength region an optical transmittance of more than 90% and a low electrical resistivity of 3.5 x 10(-4) Omega cm at room temperature. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：570 / 573
页数：4
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