Real-time optical diagnostics for epitaxial growth

被引：1
|
作者：
Aspnes, DE [1 ]
Kamiya, I [1 ]
机构：
[1] N CAROLINA STATE UNIV,DEPT PHYS,RALEIGH,NC 27695
来源：
SECOND IBEROAMERICAN MEETING ON OPTICS | 1996年 / 2730卷
关键词：
D O I：
10.1117/12.231087
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：306 / 322
页数：17
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