Rigorous electromagnetic analysis of dual-closed-surface microlens arrays

In this paper, we investigated the focal performance of the dual-closed-surface microlens arrays (DCSMAs) based on rigorous electromaognetic theory and boundary element method (BEM) in the case of TE polarization. The DCSMAs are designed with different substrate thickness and different distance between microlenses. DCSMAs designed according to different wavelengths are surveyed. The DCSMAs with different incident angles are also studied. Several focusing performance measures, such as the focal spot size, the focal position on the preset focal plane, the diffraction efficiency and the normalized transmitted power, are presented. Numerical results indicate the DCSMAs with different parameters can implement focusing beams and the focal performance of DCSMAs is easily influenced by the substrate thickness and the incident wavelength. Furthermore, the optimal thickness for the maximal diffraction efficiency of the DCSMAs is given. It is expected that the DCSMAs may be used as a parallel processing device in micro-optics systems. (c) 2007 Elsevier B.V. All rights reserved.