New in-line sputtering system SDP-2600VTX

被引：0

作者：

Kikuchi, Yukio ^{[1
]}

Matsuda, Mayako ^{[1
]}

Shindou, Takaaki ^{[1
]}

Ishino, Kouji ^{[1
]}

Tsutsui, Junichirou ^{[1
]}

Nakamura, Hajime ^{[1
]}

Koizumi, Toshiyuki ^{[1
]}

Saitou, Kazuya ^{[1
]}

Hanzawa, Kouichi ^{[1
]}

机构：

[1] ULVAC, Flat Panel Display Div 2, Chigasaki, Kanagawa, Japan

来源：

IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new in-line sputtering system for color filter is introduced and discussed with the focus on the productivity, foot print size and maintenance.

引用

页码：207 / 208

页数：2

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