Electrooptic characteristics of thin-film PLZT waveguide using ridge-type Mach-Zehnder modulator

被引：34
|
作者：
Thapliya, R [1 ]
Okano, Y [1 ]
Nakamura, S [1 ]
机构：
[1] Fuji Xerox Co Ltd, Corp Res Grp, Adv Devices & Mat Lab, Kanagawa 2430494, Japan
来源：
JOURNAL OF LIGHTWAVE TECHNOLOGY | 2003年 / 21卷 / 08期
关键词：
DC drift; electrooptic (EO) effect; PLZT waveguide;
D O I：
10.1109/JLT.2003.815511
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design, characterization, and drift due to electrical bias (DC drift) of thin-film lanthanum-doped lead zirconate titanate (PLZT) waveguide is reported using a Mach-Zehnder modulator. The mechanism of the electrooptic responses based on hysteresis of the applied field is proposed to understand the behavior of the device. It is shown that the thin film exhibits a Kerr effect having a coefficient value of 5 x 10(-18) (m/V)(2). It is reported that by utilizing hydrogen-deficient dry etching, the DC drift is improved by a factor of 3.5. In addition, the verification of the operation of a PLZT-based device for more than 1400 h at 70 degreesC is reported, for the first time.
引用
收藏
页码：1820 / 1827
页数：8
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