Hybrid gas sensor platform based on capacitive coupled field effect transistors: Ammonia and nitrogen dioxide detection

被引：16
|
作者：
Oprea, Alexandru
Frerichs, Heinz-Peter
Wilbertz, Christoph
Lehmann, Mirko
Weimar, Udo
机构：
[1] Inst Phys & Theoret Chem, D-72076 Tubingen, Germany
[2] Micronas GmbH, D-79108 Freiburg, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2007年 / 127卷 / 01期
关键词：
gas sensor; gas hybrid FET; NO2; NH3; detection;
D O I：
10.1016/j.snb.2007.07.030
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A versatile gas sensor platform based on capacitive coupled field effect transistors (CC-FET) was realised and successfully tested. The hybrid sensor structures contain gas sensitive thin organic and inorganic films incorporated in the suspended gates (SG) as sensing elements. The sensors show good functionality and gas sensitivity at room temperature. The dissipated power during operation does not exceed I MW. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：161 / 167
页数：7
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