Hybrid material integration in silicon photonic integrated circuits

被引:18
|
作者
Chakravarty, Swapnajit [1 ]
Teng, Min [1 ]
Safian, Reza [1 ]
Zhuang, Leimeng [1 ]
机构
[1] IMEC USA, 194 Neocity Way, Kissimmee, FL 34744 USA
关键词
CMOS technology; photonic integrated circuits; hybrid integration; ferroelectric modulator; ON-INSULATOR; WAVE-GUIDE; MODULATOR; LAYER;
D O I
10.1088/1674-4926/42/4/041303
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Hybrid integration of III-V and ferroelectric materials is being broadly adopted to enhance functionalities in silicon photonic integrated circuits (PICs). Bonding and transfer printing have been the popular approaches for integration of III-V gain media with silicon PICs. Similar approaches are also being considered for ferroelectrics to enable larger RF modulation bandwidths, higher linearity, lower optical loss integrated optical modulators on chip. In this paper, we review existing integration strategies of III-V materials and present a route towards hybrid integration of both III-V and ferroelectrics on the same chip. We show that adiabatic transformation of the optical mode between hybrid ferroelectric and silicon sections enables efficient transfer of optical modal energies for maximum overlap of the optical mode with the ferroelectric media, similar to approaches adopted to maximize optical overlap with the gain section, thereby reducing lasing thresholds for hybrid III-V integration with silicon PICs. Preliminary designs are presented to enable a foundry compatible hybrid integration route of diverse functionalities on silicon PICs.
引用
收藏
页数:10
相关论文
共 50 条
  • [1] Hybrid material integration in silicon photonic integrated circuits
    Swapnajit Chakravarty
    Min Teng
    Reza Safian
    Leimeng Zhuang
    Journal of Semiconductors, 2021, 42 (04) : 37 - 46
  • [2] Hybrid integration of light emitting diodes with photonic integrated circuits on silicon
    Cristea, D
    Modreanu, M
    Caldararu, M
    Cernica, I
    Avramescu, V
    CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2, 1998, : 523 - 526
  • [3] Laser hybrid integration on silicon photonic integrated circuits with reflected grating
    Sun, Yu
    Zhao, Man
    Wei, Juan
    Liu, Fengman
    Xue, Haiyun
    He, Huimin
    Cao, Liqiang
    2018 IEEE 20TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2018, : 798 - 801
  • [4] Photonic Integrated Circuits Using Heterogeneous Integration on Silicon
    Komljenovic, Tin
    Huang, Duanni
    Pintus, Paolo
    Tran, Minh A.
    Davenport, Michael L.
    Bowers, John E.
    PROCEEDINGS OF THE IEEE, 2018, 106 (12) : 2246 - 2257
  • [5] Silicon Photonic Integrated Circuits: From Devices to Integration
    Liow, Tsung-Yang
    Fang, Qing
    Lim, Andy Eu-Jin
    Ding, Liang
    Zhang, Qing Xin
    Zhang, Jing
    Duan, Ning
    Song, Junfeng
    Ren, Fang-Fang
    Cai, Hong
    Silalahi, Samson Tua Halomoan
    Yu, Mingbin
    Lo, Guo-Qiang
    Kwong, Dim-Lee
    OPTOELECTRONIC INTEGRATED CIRCUITS XIII, 2011, 7942
  • [6] Silicon Photonic devices and circuits based on hybrid integration
    Liu, Liu
    Chen, Pengxin
    Ruan, Ziliang
    Zhang, Xian
    2019 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP), 2019,
  • [7] Integrated Photonic Devices and Circuits in Hybrid Silicon Platforms
    Poon, Joyce K. S.
    Sacher, Wesley D.
    Joushaghani, Arash
    Taylor, Benjamin
    Jeong, Junho
    Mikkelsen, Jared
    Jayatilleka, Hasitha
    Aitchison, J. Stewart
    Huang, Ying
    Ding, Liang
    Lo, Guo-Qiang
    Paradis, Suzanne
    Alain, David
    2014 IEEE OPTICAL INTERCONNECTS CONFERENCE, 2014, : 27 - 28
  • [8] Hybrid silicon photonic integrated circuits for optical networking
    Burmeister, E. F.
    Chen, H. -W.
    Mack, J. P.
    Kuo, Y. -H.
    Stamenic, B.
    Blumenthal, D. J.
    Bowers, J. E.
    2008 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING, 2008, : 14 - 15
  • [9] Graphene-silicon hybrid photonic integrated circuits
    Xiao Ting-Hui
    Yu Yang
    Li Zhi-Yuan
    ACTA PHYSICA SINICA, 2017, 66 (21)
  • [10] III-V-on-Silicon Integration: From Hybrid Devices to Heterogeneous Photonic Integrated Circuits
    Ramirez, Joan Manel
    Elfaiki, Hajar
    Verolet, Theo
    Besancon, Claire
    Gallet, Antonin
    Neel, Delphine
    Hassan, Karim
    Olivier, Egolene
    Jany, Christophe
    Malhouitre, Stephane
    Gradkowski, Kamil
    Morrissey, Padraic E.
    OBrien, Peter
    Caillaud, Christophe
    Vaissiere, Nicolas
    Decobert, Jean
    Lei, Shenghui
    Enright, Ryan
    Shen, Alexandre
    Achouche, Mohand
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2020, 26 (02)